By Harland G. Tompkins
A User's consultant to Ellipsometry will let readers to maneuver past constrained turn-key functions of ellipsometers. as well as its finished discussions of the dimension of movie thickness and optical constants in movie, it additionally considers the trajectories of the ellipsometric parameters Del and Psi and the way alterations in fabrics impact parameters. This quantity additionally addresses using polysilicon, a fabric ordinarily hired within the microelectronics undefined, and the consequences of substrate roughness. 3 appendices supply worthwhile references.
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Additional info for A User's Guide to Ellipsometry
S. Chandrasekhar, A. S. Vengurlekar, S. K. Roy, and V. T. Karulkar, J. Appl. , 63, 2072 (1988). 1 Inaccessible Substrates and Unknown Films In Chapter 3, we discussed the Del/Psi trajectories for various kinds of films. From that discussion, it might appear that one simply measures Del and Psi and then determines by inspection the value of the thickness. The Del/Psi trajectory can readily be calculated if the filmfree values of Del and Psi are known (and hence N3 = n3 - j k3) and if the index of refraction N2 of the film is known.
Postulated region where Psi° and Del° will be for the oxides of Ti:W. Having a rough approximation of the thickness of the thinnest films, we simply backed off the Del°/Psi° point so that the calculation gave this value for these thinnest films. 3 The Film Index Figure 4-7 shows the experimental data points obtained from the heated samples and the native oxides along with an indication of the expected increasing thickness (based on oxidation time and tempera ture). One of the first observations is that the Del/Psi trajectory does not appear to close on itself.
Physics and Chemistry, 67A, 363 (1963). A. N. Saxena, ]. Opt. Soc. , 55,1061 (1965). F. L. McCrackin, Nat. Bur. Stand. Tech. Note 479 (1969). S. Chandrasekhar, A. S. Vengurlekar, S. K. Roy, and V. T. Karulkar, J. Appl. , 63, 2072 (1988). 1 Inaccessible Substrates and Unknown Films In Chapter 3, we discussed the Del/Psi trajectories for various kinds of films. From that discussion, it might appear that one simply measures Del and Psi and then determines by inspection the value of the thickness. The Del/Psi trajectory can readily be calculated if the filmfree values of Del and Psi are known (and hence N3 = n3 - j k3) and if the index of refraction N2 of the film is known.